Amphenol SGX Sensortech MiCS Compact MOS Air Quality Sensors

Amphenol SGX Sensortech MiCS Compact MOS Air Quality Sensors are robust MEMS sensors with a small 5mm x 7mm x 1.55mm footprint for gas detection in harsh environments. These sensors are suitable for air quality monitoring, gas leak detection, and pollution detection among others. The silicon gas sensor structure of these MiCS sensors consists of an accurately micromachined diaphragm with an embedded heating resistor and a sensing layer on top. These air quality sensors feature less than 10s response time and operate within a -30°C to +85°C temperature range.

Features

  • Small footprint for compact designs
  • Metal oxide semiconductor sensors
  • MEMS technology
  • Short time-leads
  • Less than 10s response time
  • High volume manufacturing for low-cost applications

Solutions

  • MiCS-2714 detectable gases:
    • Nitrogen dioxide (0.05ppm to 10ppm)
    • Hydrogen (1ppm to 1000ppm)
  •  MiCS-4514 detectable gases:
    • Carbon monoxide (1ppm to 1000ppm)
    • Nitrogen dioxide (0.05ppm to 10ppm)
    • Hydrogen (1ppm to 1000ppm)
    • Ethanol (10ppm to 500ppm)
    • Ammonia (1ppm to 500ppm)
    • Methane (greater than 1000ppm)
  • MiCS-5524 detectable gases:
    • Carbon monoxide (1ppm to 1000ppm)
      Hydrogen (1ppm to 1000ppm)
      Ethanol (10ppm to 500ppm) 
      Ammonia (1ppm to 500ppm)
      Methane (greater than 1000ppm)
  • MiCS-6814 detectable gases:
    • Carbon monoxide (1ppm to 1000ppm)
    • Nitrogen dioxide (0.05ppm to 10ppm)
    • Ethanol (10ppm to 500ppm)
    • Hydrogen (1ppm to 1000ppm)
    • Ammonia (1ppm to 500ppm)
    • Methane (greater than 1000ppm)
    • Propane (greater than 1000ppm)
    • Iso-butane (greater than 1000ppm

Specifications

  • Air sensing resistances
    • 0.8kΩ to 20kΩ for NO2 and NH3
    • 100kΩ to 1500kΩ for CO
  • Typical detection ranges
    • 0.05ppm to 10ppm for NO2
    • 1ppm to 1000ppm for CO
    • 1ppm to 300ppm for NH3
  • 50mW or 88mW maximum heater power dissipation
  • 8mW maximum sensitive layer power dissipation
  • Sensitivity factors
    • 2 minimum for NO2
    • 1.2 to 50 for CO
    • 1.5 to 15 for NH3
  • 4.9V to 5.1V supply
  • Temperature ranges
    • -30°C to +85°C operating
    • -40°C to +120°C storage
  • 5% to 95% relative humidity range

Mechanical Drawing

Mechanical Drawing - Amphenol SGX Sensortech MiCS Compact MOS Air Quality Sensors
Published: 2017-09-21 | Updated: 2022-03-23